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  2. Madanjeet School of Green Energy Technologies
  3. Centre for Nano Sciences & Technology
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Please use this identifier to cite or link to this item: http://localhost:8080/xmlui/handle/123456789/3528
Title: Investigation of electrical properties of zro2 and hfo2 high k dielectric thin films in mos capacitors
metadata.dc.contributor.*: Udaya Bhanu, J
Thangadurai, P
Keywords: complementary metal oxide semiconductor
microelectronic memory
MOS capacitors
Issue Date: 2019
Publisher: Centre for Nano Sciences & Technology, Pondicherry University
Description: 159p.
URI: http://localhost:8080/xmlui/handle/123456789/3528
Appears in Collections:Theses

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