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Performance Analysis of Diaphragm and Cantilever Based Mems Sensor for Environmental Applications
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| dc.contributor.author | Nallathambi, A. | |
| dc.date.accessioned | 2018-09-10T06:43:16Z | |
| dc.date.available | 2018-09-10T06:43:16Z | |
| dc.date.issued | 2016 | |
| dc.identifier.uri | http://localhost:8080/xmlui/handle/123456789/2749 | |
| dc.description | Guide:Dr.T.Shanmuganantham. | en_US |
| dc.description.sponsorship | Pondicherry University | en_US |
| dc.language.iso | en | en_US |
| dc.publisher | Department of Electronics Engineering, Pondicherry University | en_US |
| dc.relation.ispartofseries | ;T6548 | |
| dc.subject | Mems sensor | en_US |
| dc.subject | Environmental applications | en_US |
| dc.title | Performance Analysis of Diaphragm and Cantilever Based Mems Sensor for Environmental Applications | en_US |
| dc.type | Thesis | en_US |
| dc.contributor.guide | Shanmuganantham, T. | en_US |
| dc.refno | T6548 | en_US |
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Theses [11]